Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2008-06-03
2008-06-03
Berman, Jack (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C313S34600R, C313S363100, C315S501000, C315S505000, C118S050100, C136S216000
Reexamination Certificate
active
07381967
ABSTRACT:
The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.
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Bhatt Ronak J.
Chen Chiping
Zhou Jing
Berman Jack
Gauthier & Connors LLP
Massachusetts Institute of Technology
Sahu Meenakshi S
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