Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2006-05-16
2006-05-16
Lee, John R. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S42300F, C250S424000, C313S361100, C313S359100, C313S360100, C313S363100, C315S111210, C315S111310, C315S111610
Reexamination Certificate
active
07045793
ABSTRACT:
A multi-grid ion beam source has an extraction grid, an acceleration grid, a focus grid, and a shield grid to produce a highly collimated ion beam. A five grid ion beam source is also disclosed having two shield grids. The extraction grid has a high positive potential and covers a plasma chamber containing plasma. The acceleration grid has a non-positive potential. The focus grid is positioned between the acceleration grid and the shield grid. The combination of the extraction grid and the acceleration grid extracts ions from the plasma. The focus grid acts to change momentum of the ions exiting the acceleration grid, focusing the ions into a more collimated ion beam than previous approaches. In one embodiment, the focus grid has a large positive potential. In another embodiment, the focus grid has a large negative potential.
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Hensley Kim & Edgington LLC
Lee John R.
Souw Bernard E.
Veeco Instruments Inc.
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