Multipole lens, charged-particle beam instrument fitted with...

Details Multipole lens, charged-particle beam instrument fitted with... Multipole lens, charged-particle beam instrument fitted with...

2006-03-14

2006-03-14

Lee, John R. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S3960ML, C250S492100, C250S492200, C250S492210, C250S492300, C250S505100, C250S517100, C250S306000, C250S307000, C250S309000, C250S310000, C250S311000, C313S389000, C430S942000

Reexamination Certificate

active

07012261

ABSTRACT:
A multipole lens producing less magnetic field variations is offered. Also, a charged-particle beam instrument fitted with such multipole lenses is offered. The multipole lens has plural polar elements, an annular holding member, and an annular yoke disposed outside the holding member. Each polar element has a held portion and a base-end portion. The held portions of the polar elements are held by the holding member. The yoke is magnetically coupled to the base-end portions of the polar elements. The yoke is provided with openings extending circumferentially. The base-end portions of the polar elements are positioned in the openings.

REFERENCES:
patent: 3387241 (1968-06-01), Audoin et al.
patent: 4039810 (1977-08-01), Heritage
patent: 2004/0251423 (2004-12-01), Kawai
patent: 2005/0029466 (2005-02-01), Kawai et al.
patent: 02-230647 (1990-09-01), None

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