Objective lens

Details Objective lens Objective lens

1998-07-09

2000-08-15

Ham, Seungsook

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396ML, G21K 108, H01J 314, H01J 326

Patent

active

061040347

ABSTRACT:
The invention relates to an objective lens for influencing a particle beam, particularly an electron beam with a magnetic single-pole lens and an electrostatic lens having a first and a second electrode which can be supplied with different potentials. The objective lens is characterized in that the electrostatic lens is disposed after the magnetic single-pole lens in the direction of the particle beam.

REFERENCES:
patent: 4789787 (1988-12-01), Parker
patent: 5663560 (1997-09-01), Sakairi et al.
patent: 5780859 (1998-07-01), Feuerbaum et al.
patent: 5895917 (1999-04-01), Ueda et al.
patent: 5942758 (1999-08-01), Park

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