Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2008-01-03
2009-11-03
Berman, Jack I (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S298000, C250S299000, C250S300000, C315S501000, C315S500000, C313S34600R, C313S363100, C118S050100, C136S216000
Reexamination Certificate
active
07612346
ABSTRACT:
The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.
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Bhatt Ronak J.
Chen Chiping
Zhou Jing
Berman Jack I
Gauthier & Connors LLP
Massachusetts Institute of Technology
Sahu Meenakshi S
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