Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1978-07-13
1980-06-24
Dixon, Harold A.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
313409, 313443, G21K 108
Patent
active
042097029
ABSTRACT:
A multiple electron lens having two axially spaced polepieces defining a space therebetween. The polepieces each have a plurality of axial through openings aligned coaxially defining electron beam paths. A sole anode plate is disposed axially spaced from the polepieces and has openings aligned with the openings defining the beam paths and equal in number thereto. Each beam path has an auxiliary exciting coil and a corresponding stigmator coaxially arranged with the related beam path within the space defined between the polepieces.
REFERENCES:
patent: 2950390 (1960-08-01), Haine et al.
patent: 2973433 (1961-02-01), Kramer
patent: 3715580 (1973-02-01), Maekawa et al.
patent: 3852597 (1974-12-01), Yanaka et al.
Automated Electron Beam Generator by Friedmann et al., J. Vac. Sci. Tech., vol. 10, No. 6, Nov./Dec. 1973, pp. 1020-1023. _
Computer Controlled Electron Beam . . . System by Saitov et al., Journal of Physics E: Sci. Inst., 1974, vol. 1, pp. 441-444. _
Onoguchi Akira
Shirai Shogo
Adams Bruce L.
Burns Robert E.
Dixon Harold A.
Kabushiki Kaisha Akashi Seisakusho
Lobato Emmanuel J.
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