Multiple lens assembly and charged particle beam device...

Details Multiple lens assembly and charged particle beam device... Multiple lens assembly and charged particle beam device...

2011-04-19

2011-04-19

Johnston, Phillip A (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S310000, C250S311000

Reexamination Certificate

active

07928403

ABSTRACT:
The invention provides a multiple-lens assembly 1 for a charged particle beam device which comprises at least two lens sub units 2, each sub unit having an optical axis 3, wherein at least two of the optical axes of the lens sub units are inclined to each other. Further, the invention provides a charged particle beam device which comprises at least one multiple-lens assembly and a method for operating a charged particle beam device.

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European Search Report dated Jun. 28, 2006 for EP Application No. 04031042.7.

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