Multiple sextupole system for the correction of third and higher

Details Multiple sextupole system for the correction of third and higher Multiple sextupole system for the correction of third and higher

1981-04-01

1983-06-21

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

3133611, G21K 108

Patent

active

043895719

ABSTRACT:
A means is provided for compensating for third and higher order aberration in charged particle beam devices. The means includes two sextupoles with an intermediate focusing lens, all positioned between two focusing lenses.

REFERENCES:
patent: 3753034 (1973-08-01), Spicer
patent: 3781732 (1973-12-01), Wollnik
patent: 3937958 (1976-02-01), Rusch et al.
patent: 4191887 (1980-03-01), Brown
patent: 4303864 (1981-12-01), Crewe et al.

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