Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2011-08-23
2011-08-23
Nguyen, Kiet (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
Reexamination Certificate
active
08003953
ABSTRACT:
The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the magnetic field generated by a common excitation coil and leaves the desired axisymmetric field for focusing each particle beam employed within the system.
REFERENCES:
patent: 4209698 (1980-06-01), Hoppe
patent: 7576917 (2009-08-01), Lanio
patent: 2009/0261266 (2009-10-01), Lanio
International Search Report and Written Opinion, PCT/US2010/021722, mailed Mar. 18, 2010.
Chen Zhongwei
Kanai Ken-ichi
Liu Xuedong
Ren Weiming
Hermes Microvision Inc.
Nguyen Kiet
Stout, Uxa Buyan & Mullins, LLP
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