Method and apparatus for altering material using ion beams

Method and apparatus for analyzing composition of defects

Method and apparatus for applying focus correction in E-beam sys

Method and apparatus for charged particle beam exposure

Method and apparatus for charged particle beam exposure

Method and apparatus for controlling a workpiece in a vacuum cha

Method and apparatus for controlling a workpiece in a vacuum...

Method and apparatus for controlling beam current uniformity...

Method and apparatus for controlling charged particle beams in c

Method and apparatus for controlling ion implantation during...

Method and apparatus for controlling ion implantation during...

Method and apparatus for controlling ion implantation during...

Method and apparatus for controlling the rate of emission of ele

Method and apparatus for cooling a reticle during...

Method and apparatus for correcting defects of X-ray mask

Method and apparatus for curing coating materials

Method and apparatus for curing, a coating on a substrate

Method and apparatus for deflecting charged particles

Method and apparatus for detecting edge of fine pattern on speci

Method and apparatus for detecting particles in ion implantation