Method and apparatus for deflecting charged particles

Details Method and apparatus for deflecting charged particles Method and apparatus for deflecting charged particles

1998-10-21

2000-12-12

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250358, H01J 3730

Patent

active

061602620

ABSTRACT:
A large-area ion beam having a one-directionally long section is generated in a magnetically shielded ion source. The ion beam is bent evenly to form a large center angle of about 90 degrees in the direction of the short side by a window/frame type magnet having a large gap and having left and right frames each wound with a plurality of coils. Then, the ion beam is made to pass through a slit plate having a one-directionally long opening so that unnecessary ions are removed. The ion beam is then radiated onto a subject which makes a translational motion in the direction of the short side of the beam.

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patent: 5825038 (1998-10-01), Blake et al.
patent: 6016036 (2000-01-01), Brailove

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