Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2006-09-12
2006-09-12
Berman, Jack I. (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S443100, C355S030000, C355S053000, C355S072000, C355S075000, C378S034000, C165S080100, C165S080200, C165S080300, C165S080400, C165S086000
Reexamination Certificate
active
07105836
ABSTRACT:
Systems and methods eliminate vibrations produced by coolant fluid flowing through a short stroke stage and prevent change in thermally-induced distortion of the short stroke stage by maintaining the temperature and temperature distribution within the short stroke stage constant regardless of actinic heat load incident on a reticle. This is done by: (1) conducting heat through the reticle and short stroke stage components, (2) radiatively transferring heat from the short stroke stage to a long stroke stage, and (3) using convection and a cooling system to dissipate heat from the long stroke stage. The short stroke stage can be magnetically levitated from the long stroke stage. This way there is no physical contact, but the long stroke stage's movements can still control the short stroke stage's movements. By not physically contacting the long stroke stage, the short stroke stage is not affected by vibrations in the long stroke stage caused by the flowing coolant.
REFERENCES:
patent: 3171956 (1965-03-01), Coleman et al.
patent: 4226281 (1980-10-01), Chu
patent: 5289337 (1994-02-01), Aghazadeh et al.
patent: 5325180 (1994-06-01), Chappelow et al.
patent: 5801891 (1998-09-01), Lloyd
patent: 5944097 (1999-08-01), Gungor et al.
patent: 6215642 (2001-04-01), Sogard
patent: 6496528 (2002-12-01), Titus et al.
patent: 6705388 (2004-03-01), Sorgo
patent: 6809802 (2004-10-01), Tsukamoto et al.
patent: 6810298 (2004-10-01), Emoto
patent: 2002/0027644 (2002-03-01), Bisschops
patent: 2003/0035088 (2003-02-01), Emoto
patent: 0 484 179 (1992-05-01), None
patent: 1 120 690 (2001-01-01), None
patent: 1 077 393 (2001-02-01), None
patent: 1 124 161 (2001-08-01), None
patent: 1 124 161 (2001-08-01), None
patent: 1 286 221 (2003-02-01), None
patent: 1 286 221 (2003-02-01), None
patent: 2003 068626 (2003-03-01), None
European Search Report from European Patent Application No. 03023662.4, dated Aug. 31, 2005, 6 pages.
Copy of European Search Report for European Appln. 200306240-3 mailed Jun. 9, 2004.
Japanese Abstract for Japan Appln. JP 2003 068626 published Mar. 7, 2003.
del Puerto Santiago
Galburt Daniel N.
McCullough Andrew W.
Ottens Joost Jeroen
Roux Stephen
ASML Holding N.V.
Berman Jack I.
Sterne Kessler Goldstein & Fox P.L.L.C.
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