Device and method for optical processing for processing...

Device and method of positionally accurate implantation of...

Device for and a method of calibrating electron-optical apparatu

Device for electron irradiation of rolled materials

Device for generating an ion beam

Device for irradiation therapy with charged particles

Device for measuring flux and accumulated dose for an ion beam c

Device for the programmed tracing of designs by particle bombard

Device for the uniform irradiation of goods by means of electro-

Device, EUV lithographic device and method for preventing...

Device, EUV-lithographic device and method for preventing...

Devices and methods for monitoring respective operating...

Devices and methods for thermophoretic and electrophoretic...

Diamond targets for producing high intensity soft x-rays and a m

Differential pumping system and exposure apparatus

Differential pumping system and exposure apparatus

Digital parallel electron beam lithography stamp

Digitally stepped deflection raster system and method of use the

Disk scanning apparatus for batch ion implanters

Distributed direct write lithography system using multiple varia