Differential pumping system and exposure apparatus

Details Differential pumping system and exposure apparatus Differential pumping system and exposure apparatus

2005-05-24

2005-05-24

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S493100, C250S50400H, C250S365000, C250S372000

Reexamination Certificate

active

06897456

ABSTRACT:
A differential pumping system includes a first chamber for storing a light source that emits light, a second chamber that receives light from the first chamber, and a vacuum pump, provided between the first and second chambers, which includes a hollow shaft through which the light passes, and exhausts the hollow shaft.

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