Device for and a method of calibrating electron-optical apparatu

Details Device for and a method of calibrating electron-optical apparatu Device for and a method of calibrating electron-optical apparatu

1977-02-25

1978-06-13

Smith, Alfred E.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250491, G01N 2100, G21G 500

Patent

active

040951120

ABSTRACT:
A device is provided for adjusting electron-optical apparatus. The specimen to be scanned is equipped with a marker emitting back-scattered electrons. A transducer, in response to these electrons, emits a signal which unblocks the modulating electrode of a cathode ray tube used for the display purpose. The tube screen has long persistance characteristics; the beam and the object holder being displaced in four mutually perpendicular directions by theoretically corresponding quantities, the adjusting errors are visible immediately.

REFERENCES:
patent: 3857041 (1974-12-01), Spicer

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