Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1997-07-02
1998-11-10
Nguyen, Kiet T.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
250347, H01J 37244
Patent
active
058347879
ABSTRACT:
According to the present invention, an ion beam flux measurement device may include an exposure area, a measuring area disposed a predetermined distance from the exposure area, a moveable target having at least a portion thereof disposed within the exposure area, an actuator coupled to the target, and a radioactive emission detector disposed within the measuring area. The radioactive emission detector also may include a viewing portion and may detect beta rays or gamma rays. The actuator may include a feed roller and a take up roller. The target preferably may include a foil coupled to and extending between the rollers. The foil may be continuously moveable between the rollers or may be moveable in a stepwise manner. The ion beam flux measurement device also may include a collimator, preferably including a high density material when beta rays are to be detected, coupled to the radioactive emission detector. A secondary liner may be coupled to the collimator. At least a portion of the ion beam may be diverted to the exposure area and away from a normal path of the ion beam. The portion of the ion beam may be deflected with an electric charged particle deflector or a magnetic charged particle deflector.
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Blodgett-Ford Sayoko
Muirhead Donald W.
Nguyen Kiet T.
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