Diamond targets for producing high intensity soft x-rays and a m

Details Diamond targets for producing high intensity soft x-rays and a m Diamond targets for producing high intensity soft x-rays and a m

1978-07-11

1981-05-05

Smith, Alfred E.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250419, 250493, 313 55, 313330, A61K 2702, A61N 500, C08J 102, G21G 500

Patent

active

042661382

ABSTRACT:
The present invention relates to diamond targets for carbon K x-ray generators and to a method for exposing x-ray sensitive resists to carbon K x-rays using an x-ray generator with a diamond target. It has been discovered that diamond targets, preferably of Type IIb diamond, will dissipate considerably more power and thus produce higher intensity x-rays than graphite targets despite diamond's lower limiting temperature. Such x-rays allow one to expose an x-ray resist through a mask in only 67 seconds and achieve a resolution of 0.2.mu..

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