Device for the programmed tracing of designs by particle bombard

Details Device for the programmed tracing of designs by particle bombard Device for the programmed tracing of designs by particle bombard

1975-12-09

1977-09-27

Smith, Alfred E.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250398, H01J 2900

Patent

active

040513815

ABSTRACT:
The present invention relates to a device designed to automatically trace designs at a very small scale. The device comprises an electron-optical system forming an elementary image of extremely small dimensions, of a diaphragm. A scanning system makes it possible to display said image, line by line over the surface which is to be printed, in a first direction, while a mechanical system displaces the surface in a direction perpendicular to the first direction. The arrangement is controlled by a logic system supplying code numbers which indicate the programme to be followed in respect of each line. The invention applies to microelectronics.

REFERENCES:
patent: 3778626 (1973-12-01), Robertson
patent: 3866013 (1975-02-01), Ryan
patent: 3876883 (1975-04-01), Broers et al.
patent: 3894271 (1975-07-01), Pfeiffer et al.
patent: 3900737 (1975-08-01), Collier et al.
patent: 3914608 (1975-10-01), Malmberg

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