Device for generating an ion beam

Details Device for generating an ion beam Device for generating an ion beam

2005-03-08

2005-03-08

Lee, John R. (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S3960ML, C315S111210

Reexamination Certificate

active

06864495

ABSTRACT:
An ion beam generation device including an ion source, an extraction mechanism for ions emitted by the source, an accelerating mechanism of the ions thus extracted, a selector for the ions thus accelerated, and an electrostatic optical system for focusing the selected ions along a first axis. Further, a mechanism varies the distance between the ion source and the extraction means, this distance being counted along a second axis parallel to the first axis and constituting the axis of the ion beam emitted by the source. The device may be particularly applied to the manufacture of nanostructures.

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J Gierak et al.: “Design and realization of a very high-resolution FIB nanofabrication instrument” Nuclear Instruments & Methods in Physics Research, Section—A: Accelerators, Spectrometers, Detectors, and Associated Equipment, vol. 427, No. 1-2, pp. 91-98, May 11, 1999.

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