Corpuscular beam microscope, particularly electron microscope, w

Details Corpuscular beam microscope, particularly electron microscope, w Corpuscular beam microscope, particularly electron microscope, w

1975-08-06

1976-07-27

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250306, 250442, H01J 3726

Patent

active

039719367

ABSTRACT:
The determination and correction of the image drift in an electron microse is accomplished using a correction signal obtained by forming the convolution product of an actual object image (instantaneous microscope image) and a reference object image (microscope image at an earlier point in time) whose change in position is proportional to the image drift. The convolution product preferably is formed using an optical analog computer. To correct the image drift, the correlation signal is used as the controlled variable which acts on the image adjusting means.

REFERENCES:
patent: 3700895 (1972-10-01), Dicke

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