Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1976-08-19
1977-08-23
Dixon, Harold A.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250306, G01M 2300
Patent
active
040442551
ABSTRACT:
A corpuscular-beam transmission-type microscope in which image elements are generated simultaneously. The microscope includes a specimen holding stage movable perpendicular to the microscope axis in a pair of transverse adjustment directions, beam deflectors disposed behind the specimen along the beam path for deflecting an image in the microscope in at least one deflection direction, and magnetic lens imaging means disposed between the specimen and the beam deflectors which helically deflects, between the specimen and the beam deflectors, parts of the beam not disposed in the microscope axis and rotates the image of the specimen through an image rotation angle in the microscope. The improvement of the invention comprises the beam deflectors deflecting the beam in a pair of transverse deflection directions disposed in a plane parallel to the pair of transverse adjustment directions and rotated with respect to the pair of transverse adjustment directions through an angle coinciding with the image rotation angle.
REFERENCES:
patent: 2401315 (1946-06-01), Ramberg
patent: 2547994 (1951-04-01), Bertein
patent: 2580675 (1952-01-01), Grivet et al.
patent: 2688091 (1954-08-01), Tadano et al.
patent: 3504176 (1970-03-01), Thon
Krisch Burkhard
Rauch Moriz v.
Dixon Harold A.
Siemens Aktiengesellschaft
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