In-situ metrology system and method for monitoring...

In-situ monitoring of electrical properties by ellipsometry

Inspection device, inspection method, and program

Inspection method and apparatus, lithographic apparatus,...

Instruments for analyzing binding assays based on...

Integrated spectroscopic ellipsometer

Kerr effect apparatus

Laser-based cleaning device for film analysis tool

Laser-based cleaning device for film analysis tool

Low cost polametric detector

Low cost polametric detector

Magneto-optic characteristic measuring apparatus

Means and apparatus for analysing and filtering polarized...

Measurement and control of linewidths in periodic structures usi

Measurement system and method for measuring critical dimensions

Measurement system with separate optimized beam paths

Measurement systems configured to perform measurements of a...

Measurement systems configured to perform measurements of a...

Measurement technique for ultra-thin oxides

Measurements of optical inhomogeneity and other properties...