Achromatic spectroscopic ellipsometer with high spatial...
Adjustable beam alignment compensator/retarder with application
Alignment of a rotatable polarizer with a sample
Alignment of ellipsometer beam to sample surface
Angle of incidence accuracy in ultrathin dielectric layer...
Apparatus and method for detecting polarization
Apparatus and method for imaging
Apparatus and method for imaging
Apparatus and method for imaging
Apparatus and method for in-flight detection of airborne...
Apparatus and method for optical characterization of a...
Apparatus and method for optical inspection of articles
Apparatus and method for probing integrated circuits using...
Apparatus and method for probing integrated circuits using...
Apparatus and methods for measuring gaps while compensating for
Apparatus and process for performing ellipsometric measurements
Apparatus for analysis by ellipsometry, procedure for ellipsomet
Apparatus for analyzing multi-layer thin film stacks on...
Apparatus for analyzing multi-layer thin film stacks on...
Apparatus for analyzing multi-layer thin film stacks on...