Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2011-01-11
2011-01-11
Nguyen, Tu T (Department: 2886)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
07869040
ABSTRACT:
An illumination subsystem configured to provide illumination for a measurement system includes first and second light sources configured to generate light for measurements in different wavelength regimes. The illumination subsystem also includes a TIR prism configured to be moved into and out of an optical path from the first and second light sources to the measurement system. If the TIR prism is positioned out of the optical path, light from only the first light source is directed along the optical path. If the TIR prism is positioned in the optical path, light from only the second light source is directed along the optical path. Various measurement systems are also provided. One measurement system includes an optical subsystem configured to perform measurements of a specimen using light in different wavelength regimes directed along a common optical path. The different wavelength regimes include vacuum ultraviolet, ultraviolet, visible, and near infrared wavelength regimes.
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Krishnan Shankar
Kwak Hidong
Lee Shing
Zou Haixing
KLA-Tencor Technologies Corp.
Mewherter Ann Marie
Nguyen Tu T
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