Optics: measuring and testing – By polarized light examination – Of surface reflection
Patent
1996-03-18
1997-01-21
Rosenberger, Richard A.
Optics: measuring and testing
By polarized light examination
Of surface reflection
356328, 356351, G01J 400
Patent
active
055964117
ABSTRACT:
An optical inspection apparatus is disclosed for generating an ellipsometric output signal at a plurality of wavelengths, each signal being representative of an integration of measurements at a plurality of angles of incidence. A polarized, broad band light beam is focused through a lens onto a sample in a manner to create a spread of angles of incidence. The reflected beam is passed through a quarter-wave plate and a polarizer which creates interference effects between the two polarizations states in the beam. The beam is then passed through a filter which transmits two opposed radial quadrants of the beam and blocks light striking the remaining two quadrants. The beam is then focused and angularly dispersed as function of wavelength. Each element of a one dimensional photodetector array generates an output signal associated with a specific wavelength and represents an integration of the phase-sensitive ellipsometric parameter (.delta.) at a plurality of angles of incidence. A second, independent measurement is taken in order to isolate the signal of interest. In one embodiment, the azimuthal angle of the filter is rotated by ninety degrees. The output signals from the second measurement are subtracted from the corresponding output signals from the first measurement to obtain the phase-sensitive ellipsometric information at a plurality of wavelengths. The ellipsometric information is used to analyze the sample.
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International Search Report, mailed Mar. 6, 1996, for International Application No. PCT/US95/12467, with an International filing date of Sep. 27, 1995, 4 pages in length.
Fanton Jeffrey T.
Opsal Jon
Rosenberger Richard A.
Therma-Wave, Inc.
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