Sample analysis method
Sample entry purge system in spectrophotometer,...
Sample investigating system
Scatterometry to simultaneously measure critical dimensions...
Search routine for ellipsometers
Self aligning in-situ ellipsometer and method of using for proce
Self-calibrating beam profile ellipsometer
Semiconductor surface measurement system and method
Semiconductor test apparatus
Sensitive polarization monitoring and controlling
Sensor for water film on a plate in printing machines
Simultaneous multiple angle/multiple wavelength ellipsometer and
Single polarizer focused-beam ellipsometer
Small modulation ellipsometry
Small spot ellipsometer
Small spot ellipsometer
Small spot ellipsometer
Small spot spectroscopic ellipsometer with refractive focusing
Spatial filter means comprising an aperture with a non-unity...
Spectral ellipsometer without chromatic aberrations