Inspection method and apparatus, lithographic apparatus,...

Details Inspection method and apparatus, lithographic apparatus,... Inspection method and apparatus, lithographic apparatus,...

2010-03-05

2010-11-23

Punnoose, Roy (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

07839506

ABSTRACT:
The simultaneous measurement of four separately polarized beams upon diffraction from a substrate is used to determine properties of the substrate. Circularly or elliptically polarized light sources are passed via up to three polarizing elements. This polarizes the light sources by 0, 45, 90 and 135°. The plurality of polarizing beamsplitters replaces the use of a phase modulator, but enables the measurement of the intensity of all four beams and thus the measurement of the phase modulation and amplitude of the combined beams to give the features of the substrate.

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