Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2006-06-13
2006-06-13
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C356S364000
Reexamination Certificate
active
07061614
ABSTRACT:
The subject invention relates to a broadband optical metrology system that segregates the broadband radiation into multiple sub-bands to improve overall performance. Each sub-band includes only a fraction of the original bandwidth. The optical path—the light path that connects the illuminator, the sample and the detector—of each sub-band includes a unique sub-band optical system designed to optimize the performance over the spectral range spanned by the sub-band radiation. All of the sub-band optical systems are arranged to provide small-spot illumination at the same measurement position. Optional purging of the individual sub-band optical paths further improves performance.
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Fanton Jeffrey T.
McAninch Jeffrey E.
Rotter Lawrence
Wang David Y.
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