Laser-based cleaning device for film analysis tool

Details Laser-based cleaning device for film analysis tool Laser-based cleaning device for film analysis tool

2007-04-10

2007-04-10

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

C356S455000, C356S600000, C356S601000, C356S630000, C250S225000, C250S310000, C250S559270, C438S016000, C438S017000, C324S658000, C324S719000, C324S754120, C324S754120, C378S044000, C378S070000, C378S089000, C134S001000, C134S001300

Reexamination Certificate

active

10976438

ABSTRACT:
A system for analyzing a thin film uses an energy beam, such as a laser beam, to remove a portion of a contaminant layer formed on the thin film surface. This cleaning operation removes only enough of the contaminant layer to allow analysis of the underlying thin film, thereby enhancing analysis throughput while minimizing the chances of recontamination and/or damage to the thin film. An energy beam source can be readily incorporated into a conventional thin film analysis tool, thereby minimizing total analysis system footprint. Throughput can be maximized by focusing the probe beam (or probe structure) for the analysis operation at the same location as the energy beam so that repositioning is not required after the cleaning operation. Alternatively, the probe beam (structure) and the energy beam can be directed at different locations to reduce the chances of contamination of the analysis optics.

REFERENCES:
patent: 4588885 (1986-05-01), Lovoi et al.
patent: 4876983 (1989-10-01), Fukuda et al.
patent: 4975141 (1990-12-01), Greco et al.
patent: 5204517 (1993-04-01), Cates et al.
patent: 5281798 (1994-01-01), Hamm et al.
patent: 5336636 (1994-08-01), Burmer
patent: 5465154 (1995-11-01), Levy
patent: 5485091 (1996-01-01), Verkuil
patent: 5608526 (1997-03-01), Piwonka-Corle et al.
patent: 5643472 (1997-07-01), Engelsberg et al.
patent: 5666063 (1997-09-01), Abercrombie et al.
patent: 5669979 (1997-09-01), Elliott et al.
patent: 5747813 (1998-05-01), Norton et al.
patent: 5814165 (1998-09-01), Tatah et al.
patent: 6261853 (2001-07-01), Howell et al.
patent: 6274393 (2001-08-01), Hartswick
patent: 6325078 (2001-12-01), Kamieniecki
patent: 6333485 (2001-12-01), Haight et al.
patent: 6355494 (2002-03-01), Livengood et al.
patent: 6383824 (2002-05-01), Lensing
patent: 6472295 (2002-10-01), Morris et al.
patent: 6734968 (2004-05-01), Wang et al.
patent: 6930771 (2005-08-01), Rosencwaig et al.
Pending US Patent Application entitled: “Method and Apparatus for Improved X-Ray Reflection Measurement”; Janik et al., U.S. Appl. No. 10/005,610, filed Nov. 7, 2001.

Affiliated with

Also associated with

Rating

Laser-based cleaning device for film analysis tool does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser-based cleaning device for film analysis tool, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser-based cleaning device for film analysis tool will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3753995