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Imaging apparatus and method

Optics: measuring and testing – By polarized light examination – Of surface reflection

Reexamination Certificate

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Imaging apparatus and method

Optics: measuring and testing – By polarized light examination – Of surface reflection

Reexamination Certificate

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Imaging ellipsometry

Optics: measuring and testing – By polarized light examination – Of surface reflection

Reexamination Certificate

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Imaging method and apparatus

Optics: measuring and testing – By polarized light examination – Of surface reflection

Reexamination Certificate

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Imaging polarimeter detector for measurement of small spacings

Optics: measuring and testing – By polarized light examination – Of surface reflection

Patent

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Imaging system using polarization effects to enhance image...

Optics: measuring and testing – By polarized light examination – Of surface reflection

Reexamination Certificate

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In-situ metrology system and method for monitoring...

Optics: measuring and testing – By polarized light examination – Of surface reflection

Reexamination Certificate

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In-situ monitoring of electrical properties by ellipsometry

Optics: measuring and testing – By polarized light examination – Of surface reflection

Reexamination Certificate

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Inspection device, inspection method, and program

Optics: measuring and testing – By polarized light examination – Of surface reflection

Reexamination Certificate

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Inspection method and apparatus, lithographic apparatus,...

Optics: measuring and testing – By polarized light examination – Of surface reflection

Reexamination Certificate

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Instruments for analyzing binding assays based on...

Optics: measuring and testing – By polarized light examination – Of surface reflection

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Integrated spectroscopic ellipsometer

Optics: measuring and testing – By polarized light examination – Of surface reflection

Patent

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