Device for determining the position of at least one...

Details Device for determining the position of at least one... Device for determining the position of at least one...

2011-03-08

2011-03-08

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07903259

ABSTRACT:
A device for determining the position of a structure (3) on an object (2) in relation to a coordinate system is disclosed. The object (2) is placed on a measuring table (20) which is movable in one plane (25a), wherein a block (25) defines the plane (25a). At least one optical arrangement (40,50) is provided for transmitted light illumination and/or reflected light illumination. The optical arrangement (40,50) comprises an illumination apparatus (41,51) for reflected light illumination and/or transmitted light illumination and at least one first or second optical element (9a,9b), wherein at least part of the at least one optical element (9a,9b) extends into the space (110) between the block (25) and an optical system support (100). The block (25) and/or the optical system support (100) separates the illumination apparatus (41,51) spatially from the plane (25a) in which the measuring table (20) is movable.

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