Determining thickness of slabs of materials by inventors

Details Determining thickness of slabs of materials by inventors Determining thickness of slabs of materials by inventors

2006-10-03

2006-10-03

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S479000, C356S492000

Reexamination Certificate

active

07116429

ABSTRACT:
A method and apparatus for determining the thickness of slabs of materials using an interferometer.

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