Device for measuring the position of at least one structure...

Details Device for measuring the position of at least one structure... Device for measuring the position of at least one structure...

2011-01-18

2011-01-18

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S244000

Reexamination Certificate

active

07872763

ABSTRACT:
A device for measuring the position of at least one structure on a substrate is disclosed. The substrate to be measured is positioned in a mirror body. A flat insert is provided in the mirror body and is formed such that the substrate and the insert together always have the same optical thickness, irrespective of the mechanical thickness of the substrate.

REFERENCES:
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Bläsing, Dr. Carola, “Pattern Placement Metrology for Mask Making,” Semicon Conference, Education Program, Geneva, Mar. 31, 1998.

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