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Thin film actuated mirror array and method for the manufacture t

Optical: systems and elements – Mirror – With support
Patent

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Thin film actuated mirror array and method for the manufacture t

Optical: systems and elements – Mirror – With support
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Thin film actuated mirror array and method of manufacturing the

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Thin film actuated mirror array for providing double tilt angle

Optical: systems and elements – Mirror – Including specified control or retention of the shape of a...
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Thin film actuated mirror array for use in an optical projection

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Thin film actuated mirror array for use in an optical projection

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Thin film actuated mirror array for use in an optical projection

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Thin film actuated mirror array for use in an optical projection

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Thin film actuated mirror array for use in an optical projection

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Thin film actuated mirror array having an improved optical effic

Optical: systems and elements – Mirror – Plural mirrors or reflecting surfaces
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Thin film actuated mirror array having dielectric layers

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Thin film actuated mirror array having spacing member

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Thin film actuated mirror array in a optical projection system a

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Thin film actuated mirror array in an optical projection system

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Thin film actuated mirror array in an optical projection system

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Thin film actuated mirror array in an optical projection system

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Thin film actuated mirror array in an optical projection system

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Thin film actuated mirror array in an optical projection system

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Thin film actuated mirror array in an optical projection system

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Thin film actuated mirror array in an optical projection system

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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