Thin film actuated mirror array in an optical projection system

Optical: systems and elements – Optical modulator – Light wave temporal modulation

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359295, 359224, 359850, 359871, 310328, 348771, G02B 2600

Patent

active

058153055

ABSTRACT:
The thin film AMA has a substrate, an actuator, a common line, and a reflecting member. The substrate has an electrical wiring and a connecting terminal and the actuator has a supporting layer, a bottom electrode, a top electrode, and an active layer. The common line is formed on a portion of actuator and is connected to top electrode. The electrical wiring and connecting terminal may not be damaged because actuator is formed on a portion of substrate adjacent to the portion where electrical wiring and connecting terminal are formed. The voltage drop of a second signal can be minimized because common line is formed thickly on a portion of actuator, so a sufficient second signal is applied to top electrode. The flatness of reflecting member may be enhanced because reflecting member is formed on a second sacrificial layer.

REFERENCES:
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patent: 5078479 (1992-01-01), Vuilleumier
patent: 5126836 (1992-06-01), Um
patent: 5469302 (1995-11-01), Lin
patent: 5550680 (1996-08-01), Yoon
patent: 5604623 (1997-02-01), Ji et al.
patent: 5661611 (1997-08-01), Kim et al.

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