Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1997-03-10
1998-09-29
Ben, Loha
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359295, 359224, 359850, 359871, 310328, 348771, G02B 2600
Patent
active
058153055
ABSTRACT:
The thin film AMA has a substrate, an actuator, a common line, and a reflecting member. The substrate has an electrical wiring and a connecting terminal and the actuator has a supporting layer, a bottom electrode, a top electrode, and an active layer. The common line is formed on a portion of actuator and is connected to top electrode. The electrical wiring and connecting terminal may not be damaged because actuator is formed on a portion of substrate adjacent to the portion where electrical wiring and connecting terminal are formed. The voltage drop of a second signal can be minimized because common line is formed thickly on a portion of actuator, so a sufficient second signal is applied to top electrode. The flatness of reflecting member may be enhanced because reflecting member is formed on a second sacrificial layer.
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patent: 5550680 (1996-08-01), Yoon
patent: 5604623 (1997-02-01), Ji et al.
patent: 5661611 (1997-08-01), Kim et al.
Choi Yoon-Joon
Min Yong-Ki
Ben Loha
Daewoo Electronics Co. Ltd.
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