Thin film actuated mirror array and method for the manufacture t

Details Thin film actuated mirror array and method for the manufacture t Thin film actuated mirror array and method for the manufacture t

1994-10-28

1997-08-26

Dzierzynski, Paul M.

Optical: systems and elements

Mirror

With support

359872, 359873, 359876, 359214, 359221, 359224, 359295, G02B 7182, G02B 2608, G02B 2600

Patent

active

056616112

ABSTRACT:
There is provided an array of M.times.N thin film actuated mirrors for use in an optical projection system comprising an active matrix, an array of M.times.N thin film actuating structures, each of the thin film actuating structures including at least a thin film layer of a motion-inducing material, a pair of electrodes, each of the electrodes being provided on top and bottom of the thin film motion-inducing layer, an array of M.times.N supporting members, each of the supporting members being used for holding each of the actuating structures in place by cantilevering each of the actuating structures and also for electrically connecting each of the actuating structures and the active matrix, and an array of M.times.N mirrors for reflecting light beams, each of the mirrors being placed on top of each of the actuating structures. An electrical signal is applied across the thin film layer of the motion-inducing material located between the pair of electrodes in each of the actuating structures, causing a deformation thereof, which will in turn deform the mirror placed on top thereof.

REFERENCES:
patent: 1985424 (1934-12-01), Piggott
patent: 2016962 (1935-10-01), Flint et al.
patent: 2290529 (1942-01-01), Blythe
patent: 2703798 (1955-03-01), Schwartz
patent: 3544201 (1970-12-01), Fowler et al.
patent: 3614677 (1971-10-01), Wilfinger
patent: 3758199 (1973-09-01), Thaxter
patent: 4441791 (1984-04-01), Hornbeck
patent: 4518976 (1985-05-01), Tarumi et al.
patent: 4529620 (1985-07-01), Glenn
patent: 4932119 (1990-06-01), Ealey et al.
patent: 4947487 (1990-08-01), Saffer et al.
patent: 4979789 (1990-12-01), Um
patent: 5032906 (1991-07-01), Um
patent: 5035475 (1991-07-01), Lee et al.
patent: 5085497 (1992-02-01), Um et al.
patent: 5126836 (1992-06-01), Um
patent: 5138309 (1992-08-01), Gonzalez et al.
patent: 5150205 (1992-09-01), Um et al.
patent: 5159225 (1992-10-01), Um
patent: 5175465 (1992-12-01), Um et al.
patent: 5185660 (1993-02-01), Um
patent: 5212582 (1993-05-01), Nelson
patent: 5233456 (1993-08-01), Nelson
patent: 5245369 (1993-09-01), Um et al.
patent: 5247222 (1993-09-01), Engle
patent: 5260798 (1993-11-01), Um et al.
patent: 5481396 (1996-01-01), Ji et al.
patent: 5488505 (1996-01-01), Engle
patent: 5510824 (1996-04-01), Nelson

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