Thin film actuated mirror array for providing double tilt angle

Details Thin film actuated mirror array for providing double tilt angle Thin film actuated mirror array for providing double tilt angle

1995-04-17

1997-11-18

Shafer, Ricky D.

Optical: systems and elements

Mirror

Including specified control or retention of the shape of a...

359224, 359291, 359295, 359872, 310328, 310331, G02B 7182, G02B 2608, H01L 4108

Patent

active

056893809

ABSTRACT:
A thin film actuated mirror for an actuated mirror array includes a pedestal, a piezoelectric structure mounted to the pedestal, and a mirror surface interconnected to the piezoelectric structure such that the mirror surface tilts in response to the deformation of the piezoelectric material layer. The pedestal includes a first pedestal section and a second pedestal section, and the piezoelectric structure is divided into a first portion and a second portion. The piezoelectric structure includes a piezoelectric material layer having two opposing surfaces, and two metal electrodes, the electrodes being mounted on opposing surfaces of the piezoelectric material. The piezoelectric structure first portion is mounted to the first pedestal section at a proximal end of the piezoelectric structure and the second portion is mounted to the second pedestal section at a distal end of the piezoelectric structure.

REFERENCES:
patent: 4383763 (1983-05-01), Hutchings et al.
patent: 4716331 (1987-12-01), Higgins, Jr.
patent: 4915492 (1990-04-01), Toth
patent: 5085497 (1992-02-01), Um et al.
patent: 5116128 (1992-05-01), Hall et al.
patent: 5469302 (1995-11-01), Lim
patent: 5506720 (1996-04-01), Yoon

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