Thin film actuated mirror array in an optical projection system

Optical: systems and elements – Optical modulator – Light wave temporal modulation

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Details

359224, 359295, 359318, 359855, 430321, G02B 2608, G02B 7182, H01L 41053

Patent

active

059176458

ABSTRACT:
Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has a substrate having an electrical wiring for receiving a first signal applied from outside and transmitting the first signal, a first metal layer having a connecting terminal, a first passivation layer, a second metal layer, an actuator, and a reflecting member. The actuator has a supporting layer, a bottom electrode, an active layer, and a top electrode. An incident light from a light source may be excluded by means of the second metal layer formed on the first metal layer. Mis-operation of actuator due to a photo leakage current caused by an incident light can be prevented before a first signal and a second signal are respectively applied to the bottom electrode and the top electrode.

REFERENCES:
patent: 4441791 (1984-04-01), Hornbeck
patent: 4949152 (1990-08-01), Asano et al.
patent: 5126836 (1992-06-01), Um
patent: 5409851 (1995-04-01), Oh
patent: 5469302 (1995-11-01), Lim
patent: 5768006 (1998-06-01), Min et al.

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