Optical: systems and elements – Mirror – Plural mirrors or reflecting surfaces
Patent
1994-11-30
1996-08-27
Dzierzynski, Paul M.
Optical: systems and elements
Mirror
Plural mirrors or reflecting surfaces
359295, 359851, 353 99, 353 38, G02B 508, G03B 2128, G03B 2114
Patent
active
055506801
ABSTRACT:
An array of M.times.N thin film actuated mirrors for use in an optical projection system, comprises an active matrix, an array of M.times.N actuating structures, an array of M.times.N mirror layers and an array of M.times.N supporting members. Each of the actuating structures includes a first and a second identically structured actuating parts, each of the first and second actuating parts having at least a thin film layer of a motion-inducing material, a first and a second electrodes. The first electrodes from each of the first and second actuating parts are physically joined, thereby serving as the common bias electrode, and the second electrodes function as the signal electrode. Furthermore, each of the mirror layers is divided into a first and a second reflectors. Each of the reflectors is provided with a first surface, a second opposing surface and a central tab portion therebetween. The central tab portion of each reflector is directly secured on top of each actuating part such that when the central tab portion in each of the reflectors deforms in response to an electrical signal, the first and second opposing surfaces in each of the reflectors tilt while remaining planar, thereby allowing all of the first and second opposing surfaces to reflect light beams, resulting in an increased optical efficiency.
REFERENCES:
patent: 3463572 (1969-08-01), Preston, Jr.
patent: 3904274 (1975-09-01), Feinleib et al
patent: 4111538 (1978-09-01), Sheridon
patent: 4985926 (1991-01-01), Foster
patent: 5056912 (1991-10-01), Hamada et al.
patent: 5140396 (1992-08-01), Needham et al.
patent: 5175465 (1992-12-01), Um et al.
patent: 5185660 (1993-02-01), Um
patent: 5260798 (1993-11-01), Um et al.
patent: 5287215 (1994-02-01), Warde et al.
patent: 5301404 (1994-04-01), Ochiai et al.
patent: 5376857 (1994-12-01), Takeuchi et al.
patent: 5379081 (1995-01-01), Kim et al.
patent: 5423207 (1995-06-01), Flechsig
Daewoo Electronics Co. Ltd.
Dzierzynski Paul M.
Sikd-er Mohammad Y.
LandOfFree
Thin film actuated mirror array having an improved optical effic does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Thin film actuated mirror array having an improved optical effic, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin film actuated mirror array having an improved optical effic will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1059948