Thin film actuated mirror array for use in an optical projection

Details Thin film actuated mirror array for use in an optical projection Thin film actuated mirror array for use in an optical projection

1996-02-16

1998-05-26

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359295, 359224, 359846, 310328, G02B 2600

Patent

active

057575398

ABSTRACT:
An inventive array of M.times.N thin film actuated mirrors includes an active matrix, an insulating layer, an etchant stopping layer, and an array of M.times.N actuating structures. Each of the actuating structures has a tip at a distal end thereof and an etching aperture traversing therethrough, and further includes a first thin film electrode with a horizontal stripe, a thin film electrodisplacive member, a second thin film electrode, an elastic member and a conduit. The horizontal stripe, the tip and the etching aperture are created in order to increase the optical efficiency of each of the thin film actuated mirrors, facilitate the removal of the rinse and allow easy removal of the thin film sacrificial layer, respectively.

REFERENCES:
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patent: 4662746 (1987-05-01), Hornbeck
patent: 5099353 (1992-03-01), Hornbeck
patent: 5172262 (1992-12-01), Hornbeck
patent: 5247222 (1993-09-01), Engle
patent: 5481396 (1996-01-01), Ji et al.
patent: 5579179 (1996-11-01), Ji et al.

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