Thin film actuated mirror array and method of manufacturing the

Details Thin film actuated mirror array and method of manufacturing the Thin film actuated mirror array and method of manufacturing the

1996-04-29

1997-12-23

Phan, James

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359291, 359295, 359846, 359855, 359900, 310328, 310366, G02B 2608, G02B 7182

Patent

active

057011923

ABSTRACT:
An array of thin film actuated mirrors includes an active matrix and an array of actuating structures, each of the actuating structures including an elastic member, a pair of conduits, a second thin film electrode with a stripe, a thin film electrodisplacive member and a first thin film electrode. Furthermore, a method for the manufacture of the array of thin film actuated mirrors includes the steps of: providing an active matrix; depositing a thin film sacrificial layer; creating an array of pairs of empty slots in the thin film sacrificial layer; depositing an elastic layer; forming an array of conduits in the elastic layer; depositing a second thin film layer; creating stripes on the second thin film layer; depositing a thin film electrodisplacive and a first thin film layers; patterning the first thin film, the thin film electrodisplacive, the second thin film and the elastic layers, thereby forming an array of actuated mirror structures; forming a thin film protection layer; removing the thin film sacrificial layer; and removing the thin film protection layer, thereby forming the array of thin film actuated mirrors.

REFERENCES:
patent: 5552923 (1996-09-01), Min
patent: 5579179 (1996-11-01), Ji et al.
patent: 5581393 (1996-12-01), Min
patent: 5585956 (1996-12-01), Lee et al.
patent: 5604623 (1997-02-01), Ji et al.
patent: 5608569 (1997-03-01), Kim

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