Thin film actuated mirror array having dielectric layers

Details Thin film actuated mirror array having dielectric layers Thin film actuated mirror array having dielectric layers

1996-01-03

1997-06-03

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359295, 359221, 359224, 359846, 310328, G02B 2600, H01L 4104

Patent

active

056360517

ABSTRACT:
An array of M.times.N thin film actuated mirrors includes an active matrix, an array of actuating structures, each of the actuating structures including an elastic member, a second thin film electrode, a thin film electrodisplacive member and a first thin film electrode, and M.times.N number of multilayer stacks of thin film dielectric members. In addition to providing a protection against chemical or physical attacks on the first thin film electrode which also acts as a mirror for reflecting a light beam, the multilayer stack of thin film dielectric members placed on top of each of the actuating structures provides the maximum reflectance in each of the thin film actuated mirrors to thereby ensure an optimum optical efficiency of the array.

REFERENCES:
patent: 3544201 (1970-12-01), Fowler et al.
patent: 3758199 (1973-09-01), Thaxter
patent: 4492435 (1985-01-01), Banton et al.
patent: 5172262 (1992-12-01), Hornbeck
patent: 5247222 (1993-09-01), Engle
patent: 5481396 (1996-01-01), Ji et al.
patent: 5512793 (1996-04-01), Takeuchi et al.
Quantum Electronics, vol. 23, No. 9, Sep. 1993, NewYork US, pp. 813-815, XP000417894 L.L. Balakireva et al.: "optimization of highly reflective multilayer mirrors for the wavelength interval 100-150 nm" *p. 813, column 1, paragraph 2*.

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