Thin film actuated mirror array having spacing member

Details Thin film actuated mirror array having spacing member Thin film actuated mirror array having spacing member

1996-07-29

1998-09-15

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359295, 359871, 359850, 310328, 348771, G02B 2600

Patent

active

058087826

ABSTRACT:
A method for electrically connecting a thin film electrode with a connecting terminal on an active matrix in a thin film actuated mirror includes the steps of: forming a thin film sacrificial layer having an empty cavity on top of the active matrix, wherein the empty cavity encompasses the connecting terminal; forming an elastic layer on top of the thin film sacrificial layer including the empty cavity; creating a hole on the elastic layer, the hole exposing the connecting terminal and having inner surfaces; forming the thin film electrode on top of the elastic layer including the inner surfaces of the hole to thereby establish an electrical connection between the thin film electrode to the connecting terminal; and filling the hole with an insulating material. The insulating material prevents the thin film electrodes in each of the thin film actuated mirrors from coming into an electrical contact with each other, thereby preventing a short-circuit therebetween.

REFERENCES:
patent: 5604623 (1997-02-01), Ji et al.
patent: 5627673 (1997-05-01), Min

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