Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1997-07-01
1999-06-22
Epps, Georgia
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359224, 359295, 359318, 359855, 430321, G02B 2608, G02B 7182, H01L 41053
Patent
active
059148039
ABSTRACT:
Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has a substrate having an electrical wiring and a connecting terminal, an actuator formed on the substrate, and a supporting element for supporting the actuator and for preventing an initial deflection of the actuator. The actuator has a bottom electrode, an active layer, a top electrode. The supporting element has a supporting layer attached beneath the bottom electrode for supporting the actuator, a supporting member for supporting the actuator, the supporting member being formed between the substrate where the connecting terminal is formed and a bottom of a first portion of the supporting layer, and a secondary supporting member for preventing an initial deflection of the actuator, the secondary supporting member being formed between the substrate and a bottom of a second portion of the supporting layer. According to the present invention, the initial deflection of the actuator can be made uniform and a contrast of a picture projected onto a screen can be increased by reinforcing the secondary supporting member between the substrate and the supporting layer so as to reduce uneven residual stresses and stress gradients of an actuator.
REFERENCES:
patent: 5126836 (1992-06-01), Um
patent: 5469302 (1995-11-01), Lim
patent: 5754331 (1998-05-01), Min
patent: 5760947 (1998-06-01), Kim et al.
Choi Yoon-Joon
Hwang Kyu-Ho
Burke Margaret
Daewoo Electronics Co. Ltd.
Epps Georgia
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