Thin film actuated mirror array in an optical projection system

Optical: systems and elements – Optical modulator – Light wave temporal modulation

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Details

359295, 359224, 359846, 310328, 348771, G02B 2600

Patent

active

057543305

ABSTRACT:
Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has a substrate having an electrical wiring and a connecting terminal, an actuator formed on the substrate, and a reflecting member formed on the actuator. The actuator has a plurality of actuating portions in which adjacent actuating portions tilt in opposite directions one after another. Each actuating portion has bottom electrodes, active layers, top electrodes, and via contacts. The top electrodes and bottom electrodes of the actuating portions are cross-connected, so electric fields are generated in opposite directions. The reflecting member installed on the actuator has a large tilting angle. Therefore, the light efficiency of the light reflected by the reflecting member increases and the contrast of the picture projected onto a screen also increases.

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