Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1997-12-10
1999-07-06
Epps, Georgia
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359224, 359295, 359318, 359855, 430321, G02B 2608, G02B 7182, H01L 41053
Patent
active
059204214
ABSTRACT:
Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has an active matrix having electrical wiring and a connecting terminal, a first actuator, a second actuator, a supporting element, and a reflecting member. The first actuator and the second actuator are parallely formed and the supporting element is formed in the direction perpendicular to the first actuator and the second actuator. The reflecting member supported by a plurality of posts is tilted by a double displacement, so the quality of a picture projected onto a screen is greatly increased. Also, the first actuator and the second actuator respectively have symmetrical structures centering around the first anchor and the second anchor so that the first actuator and the second actuator have stable structures.
REFERENCES:
patent: 5126836 (1992-06-01), Um
patent: 5469302 (1995-11-01), Lim
patent: 5604623 (1997-02-01), Ji
patent: 5760947 (1998-06-01), Kim et al.
patent: 5805331 (1998-09-01), Lee
Burke Margaret
Daewoo Electronics Co. Ltd.
Epps Georgia
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