Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1995-03-07
1997-09-02
Epps, Georgia Y.
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359290, G02B 2600
Patent
active
056638302
ABSTRACT:
An array of M.times.N actuated mirrors comprises an active matrix, an array of M.times.N elastic members, an array of M.times.N pairs of actuating structures and an array of M.times.N mirrors. Each of the elastic members is provided with a distal and a proximal ends, the proximal end including a first and a second tab portions, the first tab and the second tab portions being separated by a retraction therebetween, the distal end including a protrusion. Each of the actuating structures is located on the first and the second tab portions on each of the elastic members, respectively. Each of the mirrors is formed on top of the elastic members. When the pair of actuating structures deform in response to an electrical signal, the first and the second tab portions tilt while the remainder of the elastic member, and, the mirror formed on top thereof, stays planar, thereby allowing all of the mirrors to reflect the light beams.
REFERENCES:
patent: 4954789 (1990-09-01), Sampsell
patent: 5062689 (1991-11-01), Koehler
patent: 5247222 (1993-09-01), Engle
patent: 5481396 (1996-01-01), Ji
Ji Jeong-Beom
Min Yong-Ki
Cornely John P.
Daewoo Electronics Co. Ltd.
Epps Georgia Y.
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