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Method and system for dry etching a metal nitride

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Reexamination Certificate

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Method and system for fabricating a multilayer laminate for a pr

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
Patent

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Method and system for identifying process conditions

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Patent

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Method and system for improving wet chemical bath process...

Etching a substrate: processes – Nongaseous phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Method and system for integrated circuit backside navigation

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Method and system for line-dimension control of an etch process

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method and system for making a nano-plate for imprint...

Etching a substrate: processes – Forming or treating optical article
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Method and system for optical figuring by imagewise heating...

Etching a substrate: processes – Nongaseous phase etching of substrate – With measuring – testing – or inspecting
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Method and system for processing multi-layer films

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method and system for providing a magnetoresistive head...

Etching a substrate: processes – Forming or treating article containing magnetically...
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Method and system for providing a package for decapsulating...

Etching a substrate: processes – Nongaseous phase etching of substrate
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Method and system for wafer inspection

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method and system of discriminating substrate type

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method employing laser ablating for providing a pattern on a sub

Etching a substrate: processes – Forming or treating electrical conductor article
Patent

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Method for a repair process

Etching a substrate: processes – Nongaseous phase etching of substrate
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Method for achieving improved selectivity in an etching process

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Method for adjusting voltage on a powered Faraday shield

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method for aligning optical devices with substrate

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Method for an optical switch on a silicon on insulator...

Etching a substrate: processes – Forming or treating optical article
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Method for an optical switch on a substrate

Etching a substrate: processes – Forming or treating optical article
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