Etching a substrate: processes – Forming or treating optical article
Reexamination Certificate
2000-09-28
2003-10-14
Kunemund, Robert (Department: 1746)
Etching a substrate: processes
Forming or treating optical article
C385S012000, C385S016000, C257S415000, C216S002000
Reexamination Certificate
active
06632374
ABSTRACT:
BACKGROUND
For optical telecommunication systems it is often necessary to switch the path of the transmitted light. Numerous different approaches have been suggested. Optical switching based on micro-electromechanical system (MEMS) mirrors is particularly attractive for communication systems. Optical switches using reflecting MEMS mirrors are convenient because free-space light transmission is used and scaling to a large-scale optical cross-connect system is possible. This is important because of current demand for optical cross-connect systems on the order of 1000×1000. Actuation to move the MEMS mirrors in an optical cross-connect system is typically electrostatic, electromagnetic, piezoelectric or thermal.
SUMMARY
Optical cross-connect systems in accordance with an embodiment of the invention involve the general concept of a two dimensional array of MEMS tilt mirrors being used to direct light coming from a first optical fiber to a second optical fiber. Each MEMS tilt mirror in the two dimensional array can tilt about two non-colinear axes and is suspended by a plurality of suspension arms attached to a silicon on insulator substrate.
REFERENCES:
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patent: 2001/0030817 (2001-10-01), Hagelin et al.
Peeters Eric
Rosa Michel A.
Ahmed Shamim
Kunemund Robert
Xerox Corporation
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