Unitary micro-flexure structure and method of making same

Details Unitary micro-flexure structure and method of making same Unitary micro-flexure structure and method of making same

1992-12-10

1995-12-19

Dang, Thi

Etching a substrate: processes

Forming or treating electrical conductor article

216 40, G11B 5105

Patent

active

054761310

ABSTRACT:
A unitary micro-flexure structure and a method of making the same, wherein the structure takes the form of an elongate dielectric flexure body having a mounting end and a free end, and which is adapted for cantilevered disposition, wherein the body takes a form which is constructed entirely from thin-film deposition and patterning processes involving the deposition of a metal oxide, and further wherein the body has a topography which is at least partially determined by etch-removable surface-boundary-defining structure.

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